Uniform Surface Oxidation of an Si Substrate by a Planar Modulated Inductively Coupled Thermal Plasma with Molecular Gas Feed. - Tial, Mai; Tanaka, Yasunori; Maruyama, Yuji; Tsuchiya, Takumi; Uesugi, Yoshihiko; Ishijima, Tatsuo (Plasma Chemistry & Plasma Processing, 2017)