Thermal-Aware Shallow Trench Isolation Design Optimization for Minimizing ${I}_{OFF}$ in Various Sub-10-nm 3-D Transistors.
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| Title: | Thermal-Aware Shallow Trench Isolation Design Optimization for Minimizing ${I}_{OFF}$ in Various Sub-10-nm 3-D Transistors. |
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| Authors: | Myeong, Ilho1, Son, Dokyun1, Kim, Hyunsuk1, Kang, Myounggon2, Jeon, Jongwook3, Shin, Hyungcheol1, hcshin@snu.ac.kr |
| Source: | IEEE Transactions on Electron Devices; Jan2019, Vol. 66 Issue 1, p647-654, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00189383 |
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| DOI: | 10.1109/TED.2018.2882577 |
