Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors. - Setiono, Andi; Fahrbach, Michael; Xu, Jiushuai; Bertke, Maik; Nyang'au, Wilson Ombati; Hamdana, Gerry; Wasisto, Hutomo Suryo; Peiner, Erwin (Journal of Sensors & Sensor Systems, 2019)