Fast response and recovery of nano-porous silicon based gas sensor.
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| Title: | Fast response and recovery of nano-porous silicon based gas sensor. |
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| Authors: | Selvakumar, V. S.1, selvakumar.vs@rajalakshmi.edu.in, Sujatha, L.2 |
| Source: | Microsystem Technologies; Mar2020, Vol. 26 Issue 3, p823-834, 12p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09467076 |
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| DOI: | 10.1007/s00542-019-04622-w |