Three-Dimensional Two-Temperature Modeling of Ar Loop-Type Inductively Coupled Thermal Plasma for Surface Modification. - Ozeki, Genki; Tanaka, Yasunori; Sugiyama, Y; Nakano, Y; Ishijima, T; Uesugi, Y; Yukimoto, T; Kawaura, H (Plasma Chemistry & Plasma Processing, 2021)