High-rate Deposition of Polycrystalline Diamond Film Using Time-series Exposure of Modulated/Non-modulated Induction Thermal Plasmas at Different Flow Rates of Carbon Source Gas. - Hata, Kazufumi; Tanaka, Yasunori; Kano, N.; Nakano, Y.; Uesugi, Y.; Ishijima, T. (Plasma Chemistry & Plasma Processing, 2021)