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Constructing and characterizing a novel MEMS-based Tuning Fork Gyroscope using PolyMUMPs.

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Title: Constructing and characterizing a novel MEMS-based Tuning Fork Gyroscope using PolyMUMPs.
Authors: Selvakumar, V. S.1, selvakumar.vs@rajalakshmi.edu.in, Sujatha, L.2, Balasubramanian, Vishal1
Source: Microsystem Technologies; Jul2021, Vol. 27 Issue 7, p2847-2855, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 150794754
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Constructing and characterizing a novel MEMS-based Tuning Fork Gyroscope using PolyMUMPs.
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s00542-020-05129-5
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 2847
    Titles:
      – TitleFull: Constructing and characterizing a novel MEMS-based Tuning Fork Gyroscope using PolyMUMPs.
        Type: main
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          Name:
            NameFull: Selvakumar, V. S.
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            NameFull: Sujatha, L.
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            NameFull: Balasubramanian, Vishal
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          Dates:
            – D: 01
              M: 07
              Text: Jul2021
              Type: published
              Y: 2021
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              Value: 27
            – Type: issue
              Value: 7
          Titles:
            – TitleFull: Microsystem Technologies
              Type: main
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