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Constructing and characterizing a novel MEMS-based Tuning Fork Gyroscope using PolyMUMPs.

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Bibliographic Details
Title: Constructing and characterizing a novel MEMS-based Tuning Fork Gyroscope using PolyMUMPs.
Authors: Selvakumar, V. S.1, selvakumar.vs@rajalakshmi.edu.in, Sujatha, L.2, Balasubramanian, Vishal1
Source: Microsystem Technologies; Jul2021, Vol. 27 Issue 7, p2847-2855, 9p
Database: Applied Science & Technology Source
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