Cu-Doped TiN x O y Thin Film Resistors DC/RF Performance and Reliability. - Shanidze, Lev V.; Tarasov, Anton S.; Rautskiy, Mikhail V.; Zelenov, Fyodor V.; Konovalov, Stepan O.; Nemtsev, Ivan V.; Voloshin, Alexander S.; Tarasov, Ivan A.; Baron, Filipp A.; Volkov, Nikita V. (Applied Sciences (2076-3417), 2021)