Properties of Al 2 O 3 Thin Films Grown by PE-ALD at Low Temperature Using H 2 O and O 2 Plasma Oxidants. - Castillo-Saenz, Jhonathan; Nedev, Nicola; Valdez-Salas, Benjamín; Curiel-Alvarez, Mario; Mendivil-Palma, María Isabel; Hernandez-Como, Norberto; Martinez-Puente, Marcelo; Mateos, David; Perez-Landeros, Oscar; Martinez-Guerra, Eduardo (Coatings (2079-6412), 2021)