Damage and residual layer analysis of reactive ion etching textured multi-crystalline silicon wafer for application to solar cells. - Kang, Dongkyun; Park, HyunJung; Choi, Dongjin; Han, Hyebin; Seol, Jaeseung; Kang, Yoonmook; Lee, Hae-Seok; Kim, Donghwan (Solar Energy, 2022)