Atomic layer etching technique for InAlN/GaN heterostructure with AlN etch-stop layer. - Du, Fangzhou; Jiang, Yang; Qiao, Zepeng; Wu, Zhanxia; Tang, Chuying; He, Jiaqi; Zhou, Guangnan; Cheng, Wei-Chih; Tang, Xinyi; Wang, Qing; Yu, Hongyu (Materials Science in Semiconductor Processing, 2022)