Current collapse suppression in AlGaN/GaN HEMTs using dual-layer SiNx stressor passivation. - Deng, Chenkai; Cheng, Wei-Chih; Chen, XiGuang; Wen, KangYao; He, MingHao; Tang, ChuYing; Wang, Peiran; Wang, Qing; Yu, HongYu (Applied Physics Letters, 2023)