Effect of Si-rich SiXNY multilayer passivation material on the DC electrical characteristics of AlGaN/GaN HEMTs. - Dinçer, Ahmet Serhat; Haliloğlu, Mehmet Taha; Toprak, Ahmet; Altındal, Şemsettin; Özbay, Ekmel (Journal of Materials Science: Materials in Electronics, 2023)