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Effects of pre-deposition on the optoelectronic properties of AZO films by atomic layer deposition.

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Bibliographic Details
Title:	Effects of pre-deposition on the optoelectronic properties of AZO films by atomic layer deposition.
Authors:	He, Jinxing^1,2, Hu, Yunfei¹, huyunfei@sztu.edu.cn, Zhang, Bingliang¹, Cai, YunHua¹, Wan, Sicheng¹
Source:	Journal of Materials Science: Materials in Electronics; Sep2023, Vol. 34 Issue 25, p1-10, 10p
Database:	Applied Science & Technology Source
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Description
ISSN:	09574522
DOI:	10.1007/s10854-023-11132-z