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Effects of pre-deposition on the optoelectronic properties of AZO films by atomic layer deposition.

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Title: Effects of pre-deposition on the optoelectronic properties of AZO films by atomic layer deposition.
Authors: He, Jinxing1,2, Hu, Yunfei1, huyunfei@sztu.edu.cn, Zhang, Bingliang1, Cai, YunHua1, Wan, Sicheng1
Source: Journal of Materials Science: Materials in Electronics; Sep2023, Vol. 34 Issue 25, p1-10, 10p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 171891853
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Effects of pre-deposition on the optoelectronic properties of AZO films by atomic layer deposition.
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  Data: <searchLink fieldCode="AU" term="%22He%2C+Jinxing%22">He, Jinxing</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Hu%2C+Yunfei%22">Hu, Yunfei</searchLink><relatesTo>1</relatesTo>, <i>huyunfei@sztu.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Bingliang%22">Zhang, Bingliang</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Cai%2C+YunHua%22">Cai, YunHua</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wan%2C+Sicheng%22">Wan, Sicheng</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%3A+Materials+in+Electronics%22">Journal of Materials Science: Materials in Electronics</searchLink>; Sep2023, Vol. 34 Issue 25, p1-10, 10p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=171891853
RecordInfo BibRecord:
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        Value: 10.1007/s10854-023-11132-z
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      – Code: eng
        Text: English
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        PageCount: 10
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      – TitleFull: Effects of pre-deposition on the optoelectronic properties of AZO films by atomic layer deposition.
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            NameFull: He, Jinxing
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            NameFull: Hu, Yunfei
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            NameFull: Zhang, Bingliang
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            NameFull: Cai, YunHua
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            – D: 01
              M: 09
              Text: Sep2023
              Type: published
              Y: 2023
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              Value: 34
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            – TitleFull: Journal of Materials Science: Materials in Electronics
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