APA (7th ed.) Citation

Gao, Y., Dong, H., Zhang, X., & Feng, W. (2023). Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films. Journal of Electronic Materials, 52(11), 7429. https://doi.org/10.1007/s11664-023-10673-7

Chicago Style (17th ed.) Citation

Gao, Yan, Haitao Dong, Xiaoke Zhang, and Wenran Feng. "Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films." Journal of Electronic Materials 52, no. 11 (2023): 7429. https://doi.org/10.1007/s11664-023-10673-7.

MLA (9th ed.) Citation

Gao, Yan, et al. "Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films." Journal of Electronic Materials, vol. 52, no. 11, 2023, p. 7429, https://doi.org/10.1007/s11664-023-10673-7.