View in EDS PDF Full Text

Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films.

Saved in:
Bibliographic Details
Title: Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films.
Authors: Gao, Yan1, Dong, Haitao1, Zhang, Xiaoke1, Feng, Wenran1, fengwenran@bipt.edu.cn
Source: Journal of Electronic Materials; Nov2023, Vol. 52 Issue 11, p7429-7437, 9p
Database: Applied Science & Technology Source
Description
ISSN:03615235
DOI:10.1007/s11664-023-10673-7