Low Loss 1 × 16/40 Flat Type Beam Splitters on Thin Film Lithium Niobate Using Photolithography Assisted Chemo‐Mechanical Etching. - Zhu, Zhuangzhuang; Wang, Zhe; Fang, Zhiwei; Lin, Dong; Zhou, Yuan; Zhong, Yunxian; Xu, Jian; He, Jinping; Cheng, Ya (Laser & Photonics Reviews, 2024)