Pulsed Aerosol-Assisted Low-Pressure Plasma for Thin-Film Deposition. - Carnide, G.; Simonnet, C.; Parmar, D.; Zavvou, Z.; Klein, H.; Conan, R.; Pozsgay, V.; Verdier, T.; Villeneuve-Faure, C.; Kahn, M. L.; Stafford, L.; Clergereaux, R. (Plasma Chemistry & Plasma Processing, 2024)