APA (7th ed.) Citation

Chaussende, D., Tabouret, V., Crisci, A., Morais, M., Coindeau, S., Berthomé, G., . . . Ou, H. (2024). Investigation of amorphous-SiC thin film deposition by RF magnetron sputtering for optical applications. Materials Science in Semiconductor Processing, 182, N.PAG. https://doi.org/10.1016/j.mssp.2024.108673

Chicago Style (17th ed.) Citation

Chaussende, Didier, et al. "Investigation of Amorphous-SiC Thin Film Deposition by RF Magnetron Sputtering for Optical Applications." Materials Science in Semiconductor Processing 182 (2024): N.PAG. https://doi.org/10.1016/j.mssp.2024.108673.

MLA (9th ed.) Citation

Chaussende, Didier, et al. "Investigation of Amorphous-SiC Thin Film Deposition by RF Magnetron Sputtering for Optical Applications." Materials Science in Semiconductor Processing, vol. 182, 2024, p. N.PAG, https://doi.org/10.1016/j.mssp.2024.108673.