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Investigation of amorphous-SiC thin film deposition by RF magnetron sputtering for optical applications.

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Title: Investigation of amorphous-SiC thin film deposition by RF magnetron sputtering for optical applications.
Authors: Chaussende, Didier1, didier.chaussende@grenoble-inp.fr, Tabouret, Vincent1, Crisci, Alexandre1, Morais, Magali1, Coindeau, Stéphane1, Berthomé, Gregory1, Kollmuss, Manuel2, Wellmann, Peter2, Jomard, François3, Pinault-Thaury, Marie-Amandine3, Lu, Yaoqin4, Shi, Xiaodong4, Ou, Haiyan4
Source: Materials Science in Semiconductor Processing; Nov2024, Vol. 182, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 178885996
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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      – Type: doi
        Value: 10.1016/j.mssp.2024.108673
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      – Code: eng
        Text: English
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            – D: 01
              M: 11
              Text: Nov2024
              Type: published
              Y: 2024
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