In situ etching of β-Ga2O3 using tert-butyl chloride in an MOCVD system. - Gorsak, Cameron A.; Bowman, Henry J.; Gann, Katie R.; Buontempo, Joshua T.; Smith, Kathleen T.; Tripathi, Pushpanshu; Steele, Jacob; Jena, Debdeep; Schlom, Darrell G.; Xing, Huili Grace; Thompson, Michael O.; Nair, Hari P. (Applied Physics Letters, 2024)