Defect Tailoring in HfO 2 /Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation. - Salas-Rodríguez, Silvestre; González-Moreno, Fernanda I.; Woo-García, Rosa M.; Herrera-May, Agustín L.; López-Huerta, Francisco; Caballero-Briones, Felipe (Applied Sciences (2076-3417), 2025)