The microstructure and electrical property of M-doped (M = W, Cr) NbN thin films.
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| Title: | The microstructure and electrical property of M-doped (M = W, Cr) NbN thin films. |
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| Authors: | Lee, Ying-Chieh1,2, yc56@mail.nsysu.edu.tw, Yang, Hau3, Hong, Ting-Fu3, Shih, Huei-Jyun1, Lee, Wen-His4 |
| Source: | Journal of Materials Science: Materials in Electronics; Jun2025, Vol. 36 Issue 16, p1-13, 13p |
| Database: | Applied Science & Technology Source |
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