Optimizing the PECVD Process for Stress-Controlled Silicon Nitride Films: Enhancement of Tensile Stress via UV Curing and Layered Deposition. - Ning, Jianping; Niu, Chunjie; Tang, Zhen; Sun, Yue; Yan, Hao; Zhou, Dayu (Coatings (2079-6412), 2025)