A Review on Reactor Design and Surface Modification of Atomic Layer Deposition for Functional Nanoparticles.
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| Title: | A Review on Reactor Design and Surface Modification of Atomic Layer Deposition for Functional Nanoparticles. |
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| Authors: | Yan, Guanghui1, yangh@ywfudan.cn, Huang, Gaoshan1,2,3, Shi, Jianjun1, Ouyang, Yi1, Zuo, Xueqin2, Bao, Zhihao1, Mei, Yongfeng1,2,3,4, yfm@fudan.edu.cn |
| Source: | Advanced Materials Interfaces; 7/25/2025, Vol. 12 Issue 14, p1-31, 31p |
| Database: | Applied Science & Technology Source |
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