View in EDS PDF Full Text

4‐2: State‐of‐the‐Art Gas Separation Function in Dynamic New Aristo TWIN PVD System Proven with IGZTO‐IGZO Dual‐Layer Thin‐Film Transistor.

Saved in:
Bibliographic Details
Title: 4‐2: State‐of‐the‐Art Gas Separation Function in Dynamic New Aristo TWIN PVD System Proven with IGZTO‐IGZO Dual‐Layer Thin‐Film Transistor.
Authors: Lin, You-Ron1, Ma, Wei-Chun1, Lin, Chun-Hung1, Liu, Jhih-Jie1
Source: SID Symposium Digest of Technical Papers; Jun2025, Vol. 56 Issue 1, p19-22, 4p
Database: Applied Science & Technology Source
Description
ISSN:0097966X
DOI:10.1002/sdtp.18073