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4‐2: State‐of‐the‐Art Gas Separation Function in Dynamic New Aristo TWIN PVD System Proven with IGZTO‐IGZO Dual‐Layer Thin‐Film Transistor.

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Title: 4‐2: State‐of‐the‐Art Gas Separation Function in Dynamic New Aristo TWIN PVD System Proven with IGZTO‐IGZO Dual‐Layer Thin‐Film Transistor.
Authors: Lin, You-Ron1, Ma, Wei-Chun1, Lin, Chun-Hung1, Liu, Jhih-Jie1
Source: SID Symposium Digest of Technical Papers; Jun2025, Vol. 56 Issue 1, p19-22, 4p
Database: Applied Science & Technology Source
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  Data: <searchLink fieldCode="JN" term="%22SID+Symposium+Digest+of+Technical+Papers%22">SID Symposium Digest of Technical Papers</searchLink>; Jun2025, Vol. 56 Issue 1, p19-22, 4p
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        Value: 10.1002/sdtp.18073
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        Text: English
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      – TitleFull: 4‐2: State‐of‐the‐Art Gas Separation Function in Dynamic New Aristo TWIN PVD System Proven with IGZTO‐IGZO Dual‐Layer Thin‐Film Transistor.
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            NameFull: Lin, You-Ron
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              Text: Jun2025
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