Enhanced structural and electrical characteristics of N-polar n-Al0.58Ga0.42N epitaxial layers grown with SiNx interlayer. - Huang, Xingyue; Zhang, Xiong; Luo, Xuguang; Fang, Ruiting; Li, Liang; Yang, Zhifeng; Shen, Xiaoting; Chen, Shijie; Li, Xinwei; Zhao, Zihao (Journal of Materials Science: Materials in Electronics, 2025)