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Design of the front-end vacuum system and performance assessment of dry pumps.

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Title: Design of the front-end vacuum system and performance assessment of dry pumps.
Authors: Liu, Shunming1,2, Wang, Yigang1,2, wangyg@ihep.ac.cn, Wang, Pengcheng1,2,3, wangpc@ihep.ac.cn, Liu, Jiaming1,2, Tan, Biao1,2, Sun, Xiaoyang1,2, Zhu, Bangle1,2, Song, Hong1,2, Guan, Yuhui1,2, Chen, Weidong1,2, Liu, Shengjin1,2, Xiao, Yongchuan1,2, Lü, Yongjia1,2, Qu, Peihua1,2
Source: Review of Scientific Instruments; Nov2025, Vol. 96 Issue 11, p1-7, 7p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 189640113
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1063/5.0301868
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      – Code: eng
        Text: English
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        PageCount: 7
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            NameFull: Wang, Yigang
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            – D: 01
              M: 11
              Text: Nov2025
              Type: published
              Y: 2025
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