Design of the front-end vacuum system and performance assessment of dry pumps.
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| Title: | Design of the front-end vacuum system and performance assessment of dry pumps. |
|---|---|
| Authors: | Liu, Shunming1,2, Wang, Yigang1,2, wangyg@ihep.ac.cn, Wang, Pengcheng1,2,3, wangpc@ihep.ac.cn, Liu, Jiaming1,2, Tan, Biao1,2, Sun, Xiaoyang1,2, Zhu, Bangle1,2, Song, Hong1,2, Guan, Yuhui1,2, Chen, Weidong1,2, Liu, Shengjin1,2, Xiao, Yongchuan1,2, Lü, Yongjia1,2, Qu, Peihua1,2 |
| Source: | Review of Scientific Instruments; Nov2025, Vol. 96 Issue 11, p1-7, 7p |
| Database: | Applied Science & Technology Source |
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