"Three‐Color" Chemical Selectivity between Oxide, Nitride, and Silicon: Area‐Selective Deposition of Metal Oxide and Polymer on SiN and Si‐H versus SiO2. - Thelven, Jeremy M.; Margavio, Hannah R. M.; Oh, Hwan; Efaw, Corey M.; Davis, Paul H.; Graugnard, Elton; Parsons, Gregory N. (Advanced Materials Technologies, 2025)