Investigation of Defect Propagation in 4H-SiC: From Substrate to Epitaxial Layers.
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| Title: | Investigation of Defect Propagation in 4H-SiC: From Substrate to Epitaxial Layers. |
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| Authors: | Fiorino, Francesco Maria1, Ruffino, Francesco1,2, Catena, Alberto3 |
| Source: | Applied Sciences (2076-3417); Mar2026, Vol. 16 Issue 6, p2727, 18p |
| Database: | Applied Science & Technology Source |
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