Compensation effect in the kinetics of chemical treatment of GaAs, InAs, GaSb, and InSb using bromine-releasing etching compositions based on H2O2–HBr solutions for the development of effective chemical polishing techniques.
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| Title: | Compensation effect in the kinetics of chemical treatment of GaAs, InAs, GaSb, and InSb using bromine-releasing etching compositions based on H2O2–HBr solutions for the development of effective chemical polishing techniques. |
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| Authors: | Sheliuk, I. O.1, irusik_shel@ukr.net, Denysiuk, R. O.2, denisuk@zu.edu.ua, Malanych, G. P.3, galya.malanich@gmail.com, Tomashyk, V. M.3, Boichuk, I. D.1, Chaika, M. V.2, Melnyk, O. F.1 |
| Source: | Physics & Chemistry of Solid State; 2025, Vol. 26 Issue 4, p760-765, 6p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 192932584 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=192932584 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.15330/pcss.26.4.760-765 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 6 StartPage: 760 Titles: – TitleFull: Compensation effect in the kinetics of chemical treatment of GaAs, InAs, GaSb, and InSb using bromine-releasing etching compositions based on H2O2–HBr solutions for the development of effective chemical polishing techniques. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Sheliuk, I. O. – PersonEntity: Name: NameFull: Denysiuk, R. O. – PersonEntity: Name: NameFull: Malanych, G. P. – PersonEntity: Name: NameFull: Tomashyk, V. M. – PersonEntity: Name: NameFull: Boichuk, I. D. – PersonEntity: Name: NameFull: Chaika, M. V. – PersonEntity: Name: NameFull: Melnyk, O. F. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 10 Text: 2025 Type: published Y: 2025 Identifiers: – Type: issn-print Value: 17294428 Numbering: – Type: volume Value: 26 – Type: issue Value: 4 Titles: – TitleFull: Physics & Chemistry of Solid State Type: main |
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