Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment. - Yuan, Zuhao; Li, Yong; She, Pengcheng; Gong, Jun; Shi, Renping; He, Qiufu; Liu, Fangting; Li, Junhui (Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 2026)