Generalizable Lithographic Hotspot Detection Using Asynchronous Meta-Learning with Only One Shot.

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Bibliographic Details
Title:	Generalizable Lithographic Hotspot Detection Using Asynchronous Meta-Learning with Only One Shot.
Authors:	Jiang, Cong¹, Wang, Yujia¹, Feng, Dan¹, Yang, Haoyu², Liu, Kang¹
Source:	DAC: Annual ACM/IEEE Design Automation Conference; 2025, Issue 62, p1-7, 7p
Database:	Applied Science & Technology Source

Description
ISSN:	0738100X
DOI:	10.1109/DAC63849.2025.11132646