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Ion mixing enhanced wafer bonding for silicon-on-insulator structures.

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Bibliographic Details
Title: Ion mixing enhanced wafer bonding for silicon-on-insulator structures.
Authors: Khánh, N. Q., Fried, M., Tóth, A.
Source: Journal of Applied Physics; December 15 1992, Vol. 72, p5602-5605, 4p
Database: Applied Science & Technology Source
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