Application of reflectance difference to monitor GaAs wet etching.
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| Title: | Application of reflectance difference to monitor GaAs wet etching. |
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| Authors: | Deppert, Knut, Jönsson, Jan, Samuelson, Lars |
| Source: | Semiconductor Science & Technology; May 1994, Vol. 9 Issue 5, p1148-1152, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
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| DOI: | 10.1088/0268-1242/9/5/022 |
