APA (7th ed.) Citation

Matsuoka, M., Isotani, S., & Miyake, S. (1996). Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition. Journal of Applied Physics, 80, 1177. https://doi.org/10.1063/1.362855

Chicago Style (17th ed.) Citation

Matsuoka, M., S. Isotani, and S. Miyake. "Effects of Ion Energy and Arrival Rate on the Composition of Zirconium Oxide Films Prepared by Ion-beam Assisted Deposition." Journal of Applied Physics 80 (1996): 1177. https://doi.org/10.1063/1.362855.

MLA (9th ed.) Citation

Matsuoka, M., et al. "Effects of Ion Energy and Arrival Rate on the Composition of Zirconium Oxide Films Prepared by Ion-beam Assisted Deposition." Journal of Applied Physics, vol. 80, 1996, p. 1177, https://doi.org/10.1063/1.362855.