Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition.
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| Title: | Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition. |
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| Authors: | Matsuoka, M., Isotani, S., Miyake, S. |
| Source: | Journal of Applied Physics; July 15 1996, Vol. 80, p1177-1181, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.362855 |
