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Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition.

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Bibliographic Details
Title: Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition.
Authors: Matsuoka, M., Isotani, S., Miyake, S.
Source: Journal of Applied Physics; July 15 1996, Vol. 80, p1177-1181, 5p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500342496
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; July 15 1996, Vol. 80, p1177-1181, 5p
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        Value: 10.1063/1.362855
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        Text: English
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        PageCount: 5
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      – TitleFull: Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition.
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            NameFull: Matsuoka, M.
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            NameFull: Isotani, S.
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              Text: July 15 1996
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              Y: 1996
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