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Salicidation process using NiSi and its device application.

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Title: Salicidation process using NiSi and its device application.
Authors: Deng, F., Johnson, R. A., Asbeck, P. M.
Source: Journal of Applied Physics; June 15 1997, Vol. 81, p8047-8051, 5p
Database: Applied Science & Technology Source
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DbLabel: Applied Science & Technology Source
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PubType: Academic Journal
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        Value: 10.1063/1.365410
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        Text: English
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        PageCount: 5
        StartPage: 8047
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      – TitleFull: Salicidation process using NiSi and its device application.
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            NameFull: Deng, F.
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            NameFull: Johnson, R. A.
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              Text: June 15 1997
              Type: published
              Y: 1997
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              Value: 81
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