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Salicidation process using NiSi and its device application.

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Bibliographic Details
Title: Salicidation process using NiSi and its device application.
Authors: Deng, F., Johnson, R. A., Asbeck, P. M.
Source: Journal of Applied Physics; June 15 1997, Vol. 81, p8047-8051, 5p
Database: Applied Science & Technology Source
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