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Structural investigation of self-aligned silicidation on separation by implantation oxygen.

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Bibliographic Details
Title: Structural investigation of self-aligned silicidation on separation by implantation oxygen.
Authors: Deng, F., Ring, K., Guan, Z. F.
Source: Journal of Applied Physics; June 15 1997, Vol. 81, p8040-8046, 7p
Database: Applied Science & Technology Source
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