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Device scaling drives pattern effect solutions.

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Bibliographic Details
Title: Device scaling drives pattern effect solutions.
Authors: Timans, P. J., Nényei, Z., Berger, R.
Source: Solid State Technology; May 2002, Vol. 45 Issue 5, p67-72, 4p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500862353
AccessLevel: 2
PubType: Periodical
PubTypeId: serialPeriodical
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Device scaling drives pattern effect solutions.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Timans%2C+P%2E+J%2E%22">Timans, P. J.</searchLink><br /><searchLink fieldCode="AU" term="%22Nényei%2C+Z%2E%22">Nényei, Z.</searchLink><br /><searchLink fieldCode="AU" term="%22Berger%2C+R%2E%22">Berger, R.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Solid+State+Technology%22">Solid State Technology</searchLink>; May 2002, Vol. 45 Issue 5, p67-72, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500862353
RecordInfo BibRecord:
  BibEntity:
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 67
    Titles:
      – TitleFull: Device scaling drives pattern effect solutions.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Timans, P. J.
      – PersonEntity:
          Name:
            NameFull: Nényei, Z.
      – PersonEntity:
          Name:
            NameFull: Berger, R.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 05
              Text: May 2002
              Type: published
              Y: 2002
          Identifiers:
            – Type: issn-print
              Value: 0038111X
          Numbering:
            – Type: volume
              Value: 45
            – Type: issue
              Value: 5
          Titles:
            – TitleFull: Solid State Technology
              Type: main
ResultId 1