The effects of Xe on an rf plasma and growth of ZnO films by rf sputtering.
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| Title: | The effects of Xe on an rf plasma and growth of ZnO films by rf sputtering. |
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| Authors: | Nagata, T., Ashida, A., Fujimura, N. |
| Source: | Journal of Applied Physics; 4/15/2004, Vol. 95 Issue 8, p3923-3927, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1682682 |
