The effects of Xe on an rf plasma and growth of ZnO films by rf sputtering.
Saved in:
| Title: | The effects of Xe on an rf plasma and growth of ZnO films by rf sputtering. |
|---|---|
| Authors: | Nagata, T., Ashida, A., Fujimura, N. |
| Source: | Journal of Applied Physics; 4/15/2004, Vol. 95 Issue 8, p3923-3927, 5p |
| Database: | Applied Science & Technology Source |
Be the first to leave a comment!
