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Ionized physical vapor deposition of titanium nitride: A deposition model.

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Bibliographic Details
Title: Ionized physical vapor deposition of titanium nitride: A deposition model.
Authors: Mao, D., Hopwood, J.
Source: Journal of Applied Physics; 7/1/2004, Vol. 96 Issue 1, p820-828, 9p
Database: Applied Science & Technology Source
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