Capacitance-voltage characterization of Ge-nanocrystal-embedded MOS capacitors with a capping Al2O3 layer.
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| Title: | Capacitance-voltage characterization of Ge-nanocrystal-embedded MOS capacitors with a capping Al2O3 layer. |
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| Authors: | Choi, Samjong, Park, Byoungjun, Kim, Hyunsuk |
| Source: | Semiconductor Science & Technology; Feb2006, Vol. 21 Issue 3, p378-381, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
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| DOI: | 10.1088/0268-1242/21/3/029 |
